Semitool Sirius HydrOzone

Wet Process
Model:
Semitool Sirius HydrOzone for sale
Price:
Request Price Quote     ID#:  3437
 
This item has been sold.
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Details:

Semitool Sirius HydrOzone System consisting of:

- Model: Sirius
- Process: DI water/ozone
- Rinse: DI water with ammonium hydroxide
- Dry: N2
- Uses a minimal amount of deionized water and ozone
- Low cost, low environmental impact process used for photoresist stripping, photolithography rework and organic cleans
- Does not require the use of sulfuric acid with its related delivery and disposal costs.
- Manually loaded semi-automated system with a 50 wafer capacity spray processing chamber.
- Can accommodate both 200mm and 300mm wafer sizes.
- Power: 208 VAC, 3 Phase, 5 wire, 60 Hz, 45 A
- Vintage: 2003
- Operator Manual and Documentation
- Full refurbishment to original Semitool Sirius specifications

Vintage:

2003

Condition:

Excellent condition


Delivery:

8-10 weeks

Price:
      ID#:  3437