Process Equipment
ABM Mask Aligner
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ABM MASK ALIGNER consisting of:
- Model: ABM
- Table Top Mask Aligner
- Configured for Top Side Alignment (TSA)
- Accomodates substrates from small chips to wafers up to 200mm
- Accommodates masks up to 9-inches square
- Maskholder included: 9" square maskholder
- Chuck included: 8" vacuum contact chuck
- Splitfield CCD/TV Alignment System
- Lamphouse: 350W
- Optics: UV400 (for 365nm and 405nm exposure)
- Power Supply: 500W
- Capable of Hard, Soft, and Vacuum contact modes
- Capable of 1um exposure resolution
- New 350 Watt lamp included
- Operations Manual
- Refurbished to meet OEM specifications
Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications.
6 Month Warranty and Specifications Guarantee.
30 Day Right of Return.
Available for Full Inspection and Demo at our Facility.
4-6 weeks
