Refurbished /Used Semiconductor & MEMS Equipment - About ClassOne Equipment

ClassOne Equipment is a leading supplier of high quality refurbished equipment to the semiconductor, MEMS, LED, wireless, and emerging technology markets. Our core product lines include Semitool, SUSS Microtec, EVG, SPTS, Oxford Instruments, Plasmatherm, and KLA-Tencor™ equipment. We provide a turn-key solution which includes full refurbishment, 6 or 12 month warranty, and installation by factory trained technicians. ClassOne provides full support solutions including spare parts and field service for all core tool sets.  Learn more:

SEMITOOL: ClassOne is the largest and most successful refurbisher of Semitool equipment in the world.  ClassOne specializes in Semitool Spray Solvent Tools (SST), Spray Acid Tools (SAT), Spin Rinse Dryers (SRD), and Electro-Chemical Deposition (ECD) Plating tools. Learn More

SUSS & EVG: We carry an extensive inventory of mask aligners and wafer bonders from the Suss MJB3, MA6, MA8, MA150CC, MA200 to the EVG 501, 520, 620, and 6200 systems. Learn More

SPTS, PLASMATHERM, & OXFORD: We offer refurbished systems, spare parts, and service of plasma etchers (RIE, DRIE, ICP) and deposition (PECVD) systems. Learn More

KLA-TENCOR: ClassOne is the world’s premier source for refurbished KLA-Tencor Wafer Metrology and Inspection Equipment. With a large inventory and a dedicated Class 100 cleanroom, we provide complete turn-key solution, including spare parts and service. Learn More

ClassOne Equipment currently has over 45 full-time employees. Our engineers and technicians have worked in technical positions at Semitool, SUSS Microtec, EVG, SPTS, and KLA-Tencor. ClassOne Equipment operates from a 40,000 square foot facility in Atlanta, Georgia, that includes four refurbishment labs with the capacity to handle up to 35 systems at one time. The rest of our facility features a Class 100 cleanroom and a fully equipped customer demonstration and acceptance lab.