About Us

ClassOne Equipment is a leading supplier of high quality refurbished equipment to the semiconductor, MEMS, LED, wireless, and emerging technology markets. Our core product lines include Semitool™, SUSS Microtec™, EVG™, SPTS™, Oxford™, Plasmatherm™, and KLA-Tencor™ equipment. We provide a turn-key solution which includes refurbishment, 6 or 12 month warranty, installation by factory trained technicians, and full support including spare parts and field service.  

ClassOne Equipment currently has over 50 full-time employees. Our engineers and technicians have worked in technical positions at SemitoolSUSS MicrotecEVGSPTS, and KLA-Tencor. We operate from a 40,000 square foot facility in Atlanta, Georgia, that includes four refurbishment labs and Class 100 Cleanroom with the capacity to handle up to 35 systems at one time.  Learn more:


SEMITOOL Wet Process Equipment: ClassOne is the largest and most successful refurbisher of Semitool equipment in the world.  We specialize in batch and single wafer process tools including the Semitool Spray Solvent Tool (SST), Spray Acid Tool (SAT), Spin Rinse Dryer (SRD), Equinox, LT210/Paragon, and Raider Electro-Chemical Plating Tool. Learn More

SUSS & EVG Mask Aligners & Bonders: ClassOne is the leading supplier of refurbished Suss & EVG mask aligners and wafer bonders with over 200 systems installed worldwide.  We carry an extensive inventory which includes the Suss MJB3, MA6/BA6, MA8MA150, MA200, and EVG 501, 520, 620, and 6200 systems. Learn More

SPTS, PLASMATHERM, & OXFORD Plasma Etchers: ClassOne offers full turn-key refurbished RIE, DRIE, and ICP plasma etchers as well as PECVD systems from SPTS, Plasmatherm, and Oxford Instruments. Learn More

KLA-TENCOR Wafer Inspection and Metrology Equipment: ClassOne is the world’s premier source for refurbished KLA-Tencor Wafer Inspection and Metrology Equipment.  Expertise is in Surfscan 6xxx, SP1, AIT, and 21xx inspection tools.  With a large inventory and a dedicated Class 100 cleanroom, we provide complete turn-key solution, including parts and service support. Learn More


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