Axcelis Fusion 200 PCU Photostabilizer
AXCELIS FUSION 200 PCU PHOTOSTABILIZER SYSTEM consisting of:
- Model: Fusion 200 PCU
- Max Wafer Size Capable: 200mm
- Shielded SECS Cables
- UV Bake Process Applications
- Irradiator Contains Hg High Intensity Lamp and 2.45 GHz Magnetrons for UV Radiation Generation
- User Selectable 50 Lot Uni-Cassette, 25 Uni-Cassette, or Cassette-to-Cassette Operation
- Microprocessor Controlled
- Pneumatic Controlled Uplift for Irradiator
- SECS I, II Software Interface
- Through-the-Wall Compatibility
- UV Port Housing
- Ergonomic Loader
- HW Harness & Switch for Right Cassette Platform
- SS Rounded Wafer Pans
- Low Vacuum Reduction Kit for Improved Chucking
- PTFE Impregnated Thermal Chuck
- Software Version: 3.271
- Operations Manual and Documentation
- Serial Number: PU0K459A
2000
Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.
6-8 weeks
