Axcelis Fusion 200 POLO Photostabilizer

Other Process
Model:
Axcelis Fusion 200 POLO Photostabilizer for sale
Price:
Request Price Quote     ID#:  3173
Picture:
8"/200mm Wafers, UV Bake Process Application
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Details:

AXCELIS FUSION 200 PCU POLO PHOTOSTABILIZER SYSTEM consisting of:

- Model: Fusion 200 PCU Polo
- Max Wafer Size: 200mm
- Shielded SECS Cables
- UV Bake process application
- Irradiator contains Hg High Intensity Lamp and 2.45 GHz magnetrons for UV radiation generation
- User selectable 50 lot uni-cassette, 25 uni-cassette, or cassette-to-cassette operation
- Microprocessor controlled
- Pneumatic controlled uplift for irradiator
- SECS I, II software interface
- Through-the-Wall Compatibility
- UV Port Housing
- Thermal Chuck
- Power: 208V, 50 Hz, 30A, 5 wire, 3 phase
- Vintage: 2003
- Refurbished by Axcelis factory trained technicians
- Guaranteed to meet all Axcelis Fusion 200 specifications
- Installation and training offered worldwide!

Difference between Fusion 200 PCU POLO and Fusion 200 PCU Standard:

The Fusion 200 POLO can generate several different levels of light intensity, while the standard PCU can only generate two levels. Also the PCU Polo has the ablitity to measure the intensity of the light, and allows the user to adjust the power setting to increase the light intensity so that it matches between tools and so that each wafer gets the same light level.

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.


Delivery:

6-8 weeks

Price:
      ID#:  3173