ClassOne Equipment is one of the world’s premier sources for refurbished KLA-Tencor Wafer Metrology and Defect Inspection Equipment. With a large inventory and a dedicated Class 100 cleanroom, our technicians provide the complete solution, from a fully refurbished system meeting original specifications, to installation and training at your facility, to after-sales service and spare parts support. We back our systems with either a 3-month or 6-month warranty on parts and labor and a 30-day return policy.
Our singular focus is on giving our customers the quality and reliability they expect at a price they can afford. We’re confident that a ClassOne refurbished KLA-Tencor system is simply the best you can buy. In addition to our order lead times being less than half those of the OEMs, buying refurbished equipment can save you up to 65% off their prices while providing the same exceptional quality and performance you demand.
WE SPECIALIZE IN THE FOLLOWING KLA-TENCOR EQUIPMENT:
- Bare Wafer Defect Inspection Surfscan 6200, 6220, 6400, 6420, SP1 Classic, SP1 TBI, SP1 DLS
- Pattern Defect Inspection (Darkfield) AIT 1, AIT 2, AIT XP+, AIT UV
- Pattern Defect Inspection (Brightfield) 2132, 2135, 2138, 2139
- Thin Film Measurement UV1050, UV1080, UV1280
- Resistivity Measurement RS35, RS55, RS75, RS100
- Profilers P10, P11, P12, P22, HRP-220
- Stress Measurement Flexus 2320, FLX-2320
- Overlay Registration 5200XP
- Wafer Thickness & Flatness Measurement ADE 9500, 9600, 9700
REFURBISHMENT PROCESS:
- System is cleaned and inspected upon arrival in our warehouse
- System is moved into our Class 100 Cleanroom
- All applicable subassemblies and components disassembled for checkout, testing, refurbishment, or replacement
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- Replace used Laser with Brand New or Refurbished Laser
- Replace used Lamp or Probehead with Brand New Lamp or Probehead
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed
- Optics assemblies cleaned and aligned to meet performance specifications or replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as needed
- Puck assembly rebuilt or replaced (if applicable)
- Replace old monitor with Brand New LCD Monitor
- Calibrate system using VLSI calibration wafers (NIST traceable)
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
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- Machine is fully tested to verify compliance to OEM specifications
- System de-installed following proper procedures
- System transport locks installed; system prepared for shipment
- Professional crating of system
- Shipping arrangements made with approved shipping company
Our team of highly-trained technicians are ready to help with the installation and training of your newly refurbished KLA-Tencor defect inspection system.
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Available Equipment
Defect Inspection
Surface Profilers
Thin Film Measurement
ClassOne has a Class 100 Cleanroom dedicated to metrology equipment refurbishment and customer acceptances.
WE OFFER THE COMPLETE SOLUTION
Large inventory of equipment, thorough refurbishment process, factory trained technicians to provide installation and training, after sales spare parts and service, up to 6 month warranty, 30-day return policy.
