Etching Systems

Etching Systems

ClassOne Equipment is the industry expert for refurbished plasma etch and deposition equipment from top manufacturers STS, Plasmatherm, and Oxford Instruments. Our factory trained technicians provide a complete turn-key solution from a fully refurbished system meeting original specifications to installation and training at your facility with after-sales service and parts support. We back our systems with an industry-leading 6-month warranty on parts and labor and a 30-day return policy.

Our singular focus is on giving our customers the quality and reliability they expect at a price they can afford. We’re confident that a ClassOne refurbished system is simply the best you can buy. In addition to our order lead times being less than half those of the OEMs, buying refurbished equipment can save you up to 65% off their prices while providing the same exceptional quality and performance you demand.

WE SPECIALIZE IN THE FOLLOWING PLASMA EQUIPMENT:

  • ST Systems (STS): Multiplex ICP (ASE, AOE, etc.), Multiplex PECVD, Pegasus Platform, All other STS RIE, ICP, and PECVD systems
  • Plasmatherm: 790 RIE, SLR-720 RIE, SLR-730 PECVD, SLR-770 ICP, All other Plasmatherm RIE, ICP, and PECVD systems
  • Oxford Instruments:Plasmalab 80 Plus, Plasmalab 100 Plus, Plasmalab 133 Plus, Plasmalab 800 Plus, All other Oxford RIE, ICP, and PECVD systems
  • Plasma Cleaners & Ashers:Bransons, PVA Tepla, Gasonics

REFURBISHMENT PROCESS:

1 Receiving and Preparation

Plasma equipment is cleaned and inspected upon arrival in our warehouse.
2 Refurbishing

All subassemblies are disassembled, cleaned, serviced, tested, reassembled and adjusted as follows:

  • Chamber disassembled and receives full wet clean.
  • All Chamber o-rings and seals are replaced with brand new.
  • Electrostatic Chuck (ESC) sent out for refurbishment (as applicable)
  • All MFCs rebuilt and calibrated professionally.
  • All corrosive gas lines replaced with brand new.
  • All Non-corrosive gas lines cleaned.
  • Vacuum pumps professionally rebuilt. 
  • Turbo pump professionally rebuilt.
  • Chillers serviced and fully tested.
  • All wiring/wire harnesses are checked, repaired or replaced if needed.
  • All liquid and air lines, tubing and fittings checked and replaced.
  • Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
  • Checkout of all electronic and mechanical parts.
  • Machine covers are cleaned, polished or replaced as needed.
3 Quality Control and Shipping
  • Equipment is fully tested to verify compliance to OEM and customer specifications.
  • Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
  • System cycle and repeatability testing completed prior to cover replacement and wipe down.
  • Transport locks installed; all system components carefully packed, labeled, and professionally crated.
  • All shipping conducted via approved vendors experienced in global transport of sensitive semiconductor equipment.

Our factory trained technicians are ready to help with the installation and training of your newly refurbished Plasma Etcher or PECVD system.

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ClassOne has a dedicated Plasma Etch refurbishment lab fully equipped for full customer demonstrations.
6 month warranty
WE OFFER THE COMPLETE SOLUTION
Large inventory of equipment, thorough refurbishment process, factory trained technicians to provide installation and training, after sales spare parts and service, up to 6 month warranty, 30-day return policy.