EVG 520HE Hot Embossing System

EVG 520HE Hot Embossing System consisting of:

- Model: 520HE
- Semi-automated Hot Embossing System
- Designed for Embossing and Nano-Imprint Litography (NIL) applications
- Accepts substrates up to 200mm
- Configured with a universal embossing chamber, high-vacuum and high-contact force capabilities
- Manages the whole range of polymers suitable for hot embossing and NIL
- Together with high-aspect ratio embossing and multiple de-embossing options many processes for high quality pattern transfer and nm resolution are offered
- Manufactured in 2007!
- System used minimally and in like-new condition!

SYSTEM FEATURES:
- For hot embossing and nano-imprinting applications of polymer substrates and spin-on polymers
- Automated embossing process
- EVG's proprietary separate alignment process for optically aligned embossing and imprinting
- Pneumatic de-embossing options
- Software controlled process execution
- UV-NIL Option (Nano Imprint Lithography)

UV-VACUUM BOND MODULE:
- Bond chamber for UV cured adhesive bonding/embossing in vacuum
- Transparent cover with bellows for uniform contact force application up to 3.5kN
- Max overpressure: 1 atmosphere for contactless pressurisation of pre-bonded wafer pairs
- Max contact force created by one atmosphere pressure differential (<14.5 PSI)
- Atmospheric capabilities down to 1 x 10 -1 mbar (7.5 x 10 -2 Torr)
- Pump time capability < 1min from 1000 to 5 mbar
- Purge time capability < 10sec from high vacuum to 1 bar
- Heating capability on bottom side heater
- 1 UV-Lightsource
- 400W Light source for UV-adhesive curing (wave length 300-500 nm)
- Intensity
- Operations manual and documentation
- Fully refurbished by former EVG factory trained technicians
- Warranty: 6 month warranty on parts and labor included
- Installation and training offered worldwide

2007

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

4-6 weeks