EVG 520HE Hot Embossing System
EVG 520HE HOT EMBOSSING SYSTEM consisting of:
- Model: 520HE
- Semi-Automated Hot Embossing System
- Designed for Embossing and Nano-Imprint Litography (NIL) Applications
- Accepts Substrates up to 200mm
- Configured with a Universal Embossing Chamber, High-Vacuum and High-Contact Force Capabilities
- Manages the Whole Range of Polymers suitable for Hot Embossing and NIL
- Together with High-Aspect Ratio Embossing and Multiple De-Embossing Options many Processes for High Quality Pattern Transfer and nm Resolution are Offered
- Manufactured in 2007!
- System Used Minimally and in Like-New Condition!
SYSTEM FEATURES:
- For Hot Embossing and Nano-Imprinting Applications of Polymer Substrates and Spin-On Polymers
- Automated Embossing Process
- EVG's Proprietary Separate Alignment Process for Optically Aligned Embossing and Imprinting
- Pneumatic De-Embossing Options
- Software Controlled Process Execution
- UV-NIL Option (Nano Imprint Lithography)
UV-VACUUM BOND MODULE:
- Bond Chamber for UV Cured Adhesive Bonding/Embossing in Vacuum
- Transparent Cover with Bellows for Uniform Contact Force Application up to 3.5kN
- Max Overpressure: 1 Atmosphere for Contactless Pressurisation of Pre-Bonded Wafer Pairs
- Max Contact Force Created by One Atmosphere Pressure Differential (<14.5 PSI)
- Atmospheric Capabilities down to 1 x 10 -1 mbar (7.5 x 10 -2 Torr)
- Pump Time Capability < 1min from 1000 to 5 mbar
- Purge Time Capability < 10sec from high vacuum to 1 bar
- Heating Capability on Bottom Side Heater
- 1 UV-Lightsource
- 400W Light Source for UV-adhesive Curing (wave length 300-500 nm)
- Operations manual and documentation
- Fully Refurbished by Former EVG Factory Trained Technicians
- Warranty: 6 Month Warranty on Parts and Labor Included
- Installation and Training Offered Worldwide
2007
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
4-6 weeks
