EVG 620 MASK ALIGNER SYSTEM consisting of:
- Model: EVG 620
- Manual Mask Aligner
- Topside Alignment (TSA)
- Bottomside Alignment (BSA)
- Manual Alignment
- Up to 6"/150mm Wafer Capable
- 1 Set of Tooling (Chuck & Maskholder)
- Can be Operated in Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes (with proper tooling)
- Tooling Exchanges are Quick, Simple and can be Performed Within Minutes
- Exposure Optics: Type C, 350nm - 450nm, Broadband
- Lamphouse: 350W Lamphouse
- Microsoft Windows based User Interface
- System PC, Keyboard, Cables
- Operations Manual for EVG 620
CLASSONE''S MASK ALIGNER REFURBISHMENT PROCESS consists of:
- Ellipsoidal Mirror Replaced with New
- UV Lamp Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed
INSTALLATION AND SUPPORT WORLDWIDE OF EVG MASK ALIGNERS:
- ClassOne Supports all its Used and Refurbished EVG Mask Aligners with Spare Parts and Service Worldwide
- Installation & Training Available Worldwide
Excellent Condition Guaranteed.Â
Fully Refurbished to Factory Specifications by ClassOne.Â
6 Month Warranty and Full Specifications Guarantee.Â
30 Day Right of Return.
8-10 weeks