EVG 620TBR Mask Aligner

Mask Aligners & Bonders
Model:
EVG 620TBR Mask Aligner for sale
Price:
Request Price Quote     ID#:  4385
Picture:
Topside Alignment, 150mm Wafers, Automatic Alignment, Like-New!
photo
photo
photo
Click an image to view full size.
Details:

EVG 620 MASK ALIGNER SYSTEM consisting of:

- Model: EVG 620TBR
- Automated Mask Aligner
- Topside Alignment (TSA)
- Bottomside Alignment (BSA)
- Automatic Alignment
- 3 Cassette Station Ergo Load Cassette Station
- Cassette to Cassette Handling (can also be operated in manual mode)
- Up to 6"/150mm Wafer Capable (with proper chuck)
- 10x Objectives (Qty 4)
- Vacuum Chuck: To Be Determined at Time of Order
- Maskholder: To Be Determined at Time of Order
- Can be Operated in Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes (with proper tooling)
- Tooling Exchanges are Quick, Simple and can be Performed Within Minutes
- Exposure Optics: Type C, 350nm - 450nm, Broadband
- Lamphouse: 500W Lamphouse
- Motorized Alignment Stage (X, Y, Theta Directions) to the 3-Axis Joystick
- Microsoft Windows based User Interface
- System PC, Keyboard, Cables
- Operations Manual for EVG 620
- Vintage: 2002



CLASSONE''S MASK ALIGNER REFURBISHMENT PROCESS consists of:

1) Main System Body:
- Ellipsoidal Mirror Replaced with New
- UV Lamp Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed

2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Air lines Inspected & Replaced as Needed
- Wheels Inspected & Replaced as Needed
- Leveling Feet Inspected & Replaced as Needed




INSTALLATION AND SUPPORT WORLDWIDE OF EVG MASK ALIGNERS:

- ClassOne Supports all its Used and Refurbished EVG Mask Aligners with Spare Parts and Service Worldwide
- Installation & Training Available Worldwide
- Learn more: http://www.classoneequipment.com/content/mask-aligners

Condition:

Excellent Condition Guaranteed. 
Fully Refurbished to Factory Specifications by ClassOne. 
6 Month Warranty and Full Specifications Guarantee. 
30 Day Right of Return.


Delivery:

8-10 weeks

Price:
      ID#:  4385