EVG 420 Mask Aligner

EVG 420 Mask Aligner consisting of:

- Model: EV420
- Manual wafer load mask aligner
- Setup for Topside and Backside Alignment (BSA)
- Capable of processing small pieces up to 4" diameter wafers
- Capable of soft, hard, vacuum, and proximity contact exposure modes
- Exposure Resolution: sub-micron
- 350W Lamphouse
- UV400 optics (peak exposure at 365nm and 405nm)
- Maskholder: 4"x4" maskholder
- Vacuum Chuck: 4" diameter wafers
- Newport Vibration Isolation Table
- EVG LPS-1000 Lamp Supply
- Ushio 350W Lamp (brand new)
- Operations Manual for EVG 420
- Refurbished by EVG factory trained technician
- Guaranteed to meet all original EVG 420 specifications
- Used minimally in R&D environment (excellent condition)
- Our refurbishment process: http://www.classoneequipment.com/content/mask-aligners.

1999

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications.
6 Month Warranty and Specifications Guarantee.
30 Day Right of Return.
Available for full inspection and demo at our facility.

6 weeks