FSI Mercury Wet Process System
FSI MERCURY OC WET PROCESS SYSTEM consisting of:
- Model: Mercury OC
- Semi-Auto Batch Spray System
- Maxiumum wafer size: 200mm (25 wafer carrie)r
- Maximum motor speed: 1000 RPM
- Canister volume: 14.5 liters
- Mercury Process Console
- Mercury Turntable
- Mercury Touchscreen
- Chemistry setup:
a) Ammonium Hydroxide
b) Hydrogen Peroxide
c) Sulfuric Acid
d) Hydrofluoric Acid (HF)
- Operations and Maintenance Manuals (full set)
- Power: 115VAC, 15 Amps, 1PH, 60Hz
More Info about FSI Mercury OC:
- Applications include FEOL post-ash clean and resist strip, post salicide formation clean, critical clean using RCA-type chemistries and BEOL dilute mineral acid cleans.
- Used for Critical Clean & Etch, All-Wet Resist Strip & Clean, Silicide Metal Strip, or BEOL Strip & Clean
N/A
Excellent Condition Guaranteed.
Refurbished by former Semitool Factory Trained Technician.
Available for Full Inspection and Demonstration at ClassOne Equipment.
3 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.
6-8 weeks
