Hitachi S-8840 SEM

HITACHI S-8840 SEM consisting of:

- Manufacturer: Hitachi
- Model: S-8840
- Wafer Size: 200mm
- Hitachi S-8840 CD SEM Mainframe
- CD measuring size: 130-160nm, consistently
- Version 11.7 S/W or newer
- SECS/GEM Communication Interface
- Additional hard disk drive (>1GB)
- VRT board w/ 8 mb of memory
- DSP compatible conductive wafer holder
- Hitachi Hi Tech Electron Gun
- Accelerating voltage, 500V to 1300V, 10V steps
- Probe current, 1-16pA at 800V, 1-10pA at 1000V, 1-13pA at 1300V
- 3 Stage Electromagnetic Lens System
- Objective Lens: 4 opening click stop, heated aperture is selectable/adjustable outside the vacuum system
- 2-Stage Deflection Scan Coil
- Astigmatism correction via an 8-pole electromagnetic coil
- Magnification = 1000x to >150000x
- Field control method ; Continuously on for sample decharging, at all voltages
- Wafer imaging ability; Entire surface of 8" wafer
- Depth of focus: >= 1.0mm at 80000x magnification
- Resolution: < 8nm at 700V - 1000V (or < 6nm with optional retarding voltage), < 6nm at 1000V - 1300V
-Retarding voltage: Optional at <= 800V for improved resolution
- Hitachi Probe Tip (Brand New)
-Optical Microscope System: Image is Monochrome, using CCD camera, Magnification is 110x, Wafer imaging X & Y coverage from 5–195mm , notch down
- Dual XY Hitachi Microscale
- Workstation, HP B180L
- Error Tracking Software
- Multipoint Measurement Function
- Edge Roughness Function
- Contact Hole Measurement Function
- Automated Image Archiving Function
- Operations Manual and Documentation
- System fully refurbished to meet original Hitachi S8840 specifications

1999

6-8 weeks