
HITACHI S-9220 SEM consisting of:
- Manufacturer: Hitachi
- Model: S-9220 CD SEM
- Wafer Size: 200mm
- Handler: Dual Open Cassette
- Hitachi S-9220 CD SEM Mainframe
- Image Resolution: 3nm (30A) at 0.8kv Accelerating Voltage
- Accelerating Voltage Range: 0.5kv to 1.3kv
- Working Distance: Fixed
- Magnification Range: 1 kx to 300 kx
- Measurement Range: 0.1 to 2.0 u
- Reproducibility: 3 nM
- Measurement Mode: Full Feature, Multi-Feature
- Throughput: 45 Wafers/Hour
- SEM Images: 1kx to 300kx, Guaranteed Reproducibility 40kx ti 200kx
- Stage Position Control: Linear Scale Feedback
- Vintage: 2001
- Refurbished by Hitachi Factory Trained Technicians to Meet Original Specifications
- ClassOne supports all its refurbished Hitachi SEMs with installation, training, service and support worldwide!
2001
6-8 weeks