
SUSS MA150CC BSA MASK ALIGNER consisting of:
- Model: MA150cc
- Manufacturer: Suss MicroTec / Karl Suss
- Topside Alignment
- Cassette to Cassette Operation
- Can be used in either Automatic or Manual Mode
- Automatic Alignment
- Optical Prealigner
- Max Wafer Size: 6"/150mm Wafer Capable
- 1000 Watt Lamphouse
- UV400 Optics (for 365nm and 405nm exposure)
- UV400 Front Lens
- Suss CIC1000 Lamp Power Supply
- Suss DVM6 Microscope
- CCD Camera Right and Left
- Capable of Hard, Soft, and Vacuum Contact Exposure Modes
- Flat Panel Touchscreen
- Serial Number: 430
- Operations Manual for Suss MA150
- Refurbished to Meet Original Suss MA150 Mask Aligner Specifications
- YouTube Video of Previous Used Suss MA150 Refurbished by ClassOne:
http://www.youtube.com/watch?v=5t7YMwpOim4.
CLASSONE'S MASK ALIGNER REFURBISHMENT PROCESS consists of:
1) Main System Body:
- Ellipsoidal Mirror Replaced with New
- UV Bulb Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Shutter Cylinders Replaced with New
- Mirror House Cylinder Replaced with New
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Illumination Bulbs Replaced with New
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed
2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Air lines Inspected & Replaced as Needed
- Wheels Inspected & Replaced as Needed
- Leveling Feet Inspected & Replaced as Needed
3) If Applicable:
- Transport Slide Rebuilt
- Pre-Aligner Assembly Rebuilt
- Wafer Alignment Stage Rebuilt
- Cassette Elevator Rebuilt
INSTALLATION AND SUPPORT WORLDWIDE OF SUSS MASK ALIGNERS:
- ClassOne Supports all its Used and Refurbished Suss Mask Aligners with Spare Parts and Service Worldwide
- Installation & Training Available Worldwide
- Learn more: http://www.classoneequipment.com/content/mask-aligners
N/A
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
8 weeks