Karl Suss MA6 Mask Aligner
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KARL SUSS MA6 MASK ALIGNER consisting of:
- Model: MA6 BSA
- Wafer size: small pieces up to 6"/150mm diameter wafers
- Topside and Backside Alignment (BSA)
- Suss M306 Microscope
- Objectives: 5x & 10x (2 sets)
- UV400 Optics (for 365nm and 405nm exposure)
- Suss CIC 1200 Power Supply
- Capable of Hard, Soft, Vacuum, and Proximity Contact
- 350W Lamphouse
- Vibration Isolation Table (for Suss MA6)
- 1 Vacuum Chuck included (select from available sizes)
- 1 Maskholder included (select from available sizes)
- System Power: 230V, 50/60 Hz
- Manufactured in 2002
- Serial Number: 757
- Operations Manual for Suss MA6 Mask Aligner
- Refurbished to meet original Suss MA6 specifications
More Information about Suss MA6 Mask Aligner:
- The MA6 is designed for all standard lithography applications.
- For thick resist MEMS applications the MA6 offers high quality exposure optics for high resolution and optimum edge quality.
- The Bottom Side Alignment (BSA) option allows for pattern printing on both sides of the substrate.
- The MA6 offers tailored features for fragile III-V compounds, thinned or warped wafers.
- The MA6/BA6 Mask Aligner offers special techniques for bond alignment, Imprinting, and Near Field Holography (additional tooling required).
- Review our Suss MA6 refurbishment process: http://www.classoneequipment.com/content/mask-aligners.
2002
Fully Reconditioned to Factory Specifications by ClassOne Equipment.
6 Month Warranty and Specifications Guarantee.
30 Day Right of Return.
Available for Full Inspection and Demo at our Facility.
6-8 weeks
