ClassOne Equipment is the world leader in refurbished KLA-Tencor Wafer Metrology and Inspection Equipment. With a large inventory and a dedicated Class 100 cleanroom, our technicians provide the complete solution, from a fully refurbished system meeting original specifications, to installation and training at your facility, to after-sales spare parts and field service support. We back our systems with either a 3-month or 6-month warranty on parts and labor and a 30-day return policy. Buying refurbished equipment can save you 50% or more versus OEM prices while providing the same exceptional quality and performance you demand.  Our KLA-Tencor product line consists of:

BARE WAFER INSPECTION: the Surfscan series is the standard for bare wafer inspection.  ClassOne’s focus is in the Surfscan 6200, 6220, 6400, 6420, and SP1 systems

PATTERNED WAFER INSPECTION : For patterned wafer inspection there is no better system than the KLA AIT series from the AIT 1, AIT 2, AIT XP, AIT UV, and XUV series.

FILM MEASUREMENT:  For optical films measurement ClassOne offers the UV1050, UV1080, UV1250, UV1280, and F5x.  For metal film thickness measurement ClassOne offers the RS-series 4-point probe systems.

SURFACE METROLOGY: Surface Profilers, Stress Measurement, Overlay Registration, and more surface metrology equipment.


• NEW Lasers
• Wafer Chucks, End Effectors, Robots
• Boards
• Save up to 50% on parts!


• Laser Changes
• Service Calls
• Quarterly PMs
• Service Contracts
• Save up to 50% on service!

ClassOne supports all refurbished KLA-Tencor equipment with spare parts and service.

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