KLA-Tencor 2135 Surface Inspection System

KLA-TENCOR 2135 SURFACE INSPECTION SYSTEM consisting of:

- KLA-Tencor 2135 Mainframe
- Current Wafer Size: 200mm
- SECS II/GEM Communication Interface
- Pentium CPU with Windows NT Installed
- NT box option-direct link/direct SECS
- DOS computer
- FeB dissociation light assembly
- Mercury Xenon Lamp
- Light level sensor with adjustable 2x Mag Tubes
- X/Y/Z drive/controller chassis and motion controller card
- High voltage electronics
- Granite stage
- Autofocus III with 200mm Collimating Lens
- Low contact chuck
- Compatible with Empak Cassette XT200-300 (with carbon fiber Polypro material)
- User Interface Monitor
- Left hand side User interface
- Remote Power Distribution Panel
- Wafer handling module
- Cassette ergo loaders
- Direct Link hardware with ADC review optics
- EMO`s with switch covers
- Blower Box included
- Operations Manual for KLA 2135

n/a

6-8 weeks