KLA-TENCOR 2139 SURFACE INSPECTION SYSTEM consisting of:
- Model: 2139 (Upgraded from 2138)
- Wafer Size: Currently Configured for 8"/200mm
- Single or Dual Processor IPC
- Cassette Queuing Hardware:
*Light Towers
*Job Queuing
*Standard Cassette Plates
- ISECS Option as Standard (SECS/GEM Interface, ISECS, ILINK)
- Array Mode Pixel: 0.16, 0.25, 0.39, 0.62, 0.125
- Random Mode Pixel: 0.16, 0.25, 0.39, 0.62, 0.125
- Wafer Chuck 200mm Wafer, Low Contact
- Semi-Auto Image Store
- CE Compliant Line Conditioner
- XE (Xenon) Light Source
- KLA Software Version: TBD
- 2139 Optics Kit:
*Sony DXC 9000 Camera
*3.125X, 2XH, 2XL Power Changer
*Kinematic Mirror BF Assembly
*ADC Camera Aperture Assembly
*2139 Slide Mirror Assembly
*Optics Covers ADC 2139 Assembly
- 2139 User Interface Kit including:
*MMED
*Industrial PC
*AutoSAT Hardware
- MO Drive
- Blower Box included
- Operations Manual & Documentation