
KLA-TENCOR 5200 OVERLAY REGISTRATION SYSTEM consisting of:
- Model: KLA 5200 Overlay Registration System
- 200mm wafer capable system
- Fully automated non contact box-in-box measurement (stepper alignment)
- Uses Coherence Probe Microscopy (CPM) technology
lowers stepper cost of ownership
- Measures all layers, including low-contrast or grainy targets
- Operations Manual for KLA 5200 Overlay Registration System
- Refurbished to meet original KLA-Tencor 5200 specifications.
Excellent Condition Guaranteed.
Fully Reconditioned to Meet Factory Specifications by ClassOne.
3 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.
6-8 weeks