KLA-Tencor 5200XP Overlay Registration System

Surface Metrology
Model:
KLA-Tencor 5200XP Overlay Registration System for sale
Price:
Request Price Quote     ID#:  P5719
 
This item has been sold.
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Details:

KLA-TENCOR 5200XP OVERLAY REGISTRATION SYSTEM consisting of:

- Model: 5200XP Main System
- CPM Advanced Overlay
- 8"/200mm Wafer Capable System
- CD Measurement option installed
- Fully Automated Non-Contact Box-In-Box Measurement (Stepper Alignment)
- Uses Coherence Probe Microscopy (CPM) Technology
- GEM / SECS: 5.3.26
- Indexer: type 2, port open
- Console VAX/XP
- Blower Box
- Stainless Steel Skins
- Reflective Host Chuck
- Software Version:
Main: 14.70.01
Motor: 11.10.18
Klass: 4.1.1.1
XP Software
- Lowers Stepper Cost of Ownership
- Measures all Layers, including Low-Contrast or Grainy Targets
- Operations Manual for KLA-Tencor 5200XP Overlay Registration System
- Refurbished to meet KLA-Tencor 5200XP specifications

Vintage:

N/A

Condition:

Excellent Condition Guaranteed.
Fully Reconditioned to Meet Factory Specifications by ClassOne.
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.


Delivery:

6-8 weeks

Price:
      ID#:  P5719