
KLA-TENCOR 5200XP OVERLAY REGISTRATION SYSTEM consisting of:
- Model: 5200XP
- Overlay Registration System
- 8"/200mm Wafer Capable System
- Fully Automated Non-Contact Box-In-Box Measurement (Stepper Alignment)
- Uses Coherence Probe Microscopy (CPM) Technology
- Lowers Stepper Cost of Ownership
- Measures all Layers, including Low-Contrast or Grainy Targets
- Operations Manual for KLA-Tencor 5200XP Overlay Registration System
- Refurbished to Meet KLA-Tencor 5200XP Specifications
N/A
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
6-8 weeks