KLA-Tencor AIT I
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KLA-TENCOR AIT I 8020 PATTERNED SURFACE DEFECT INSPECTION SYSTEM consisting of:
- Model: AIT I 8020 Main System
- KLA-Tencor AIT I Mainframe
- Currently configured for 8"/200mm wafers
- Double Darkfield Inspection Tool
- SECS II/GEM Communication Interface
- Low contact chuck (AIT I)
- Multi Channel collection optics system with independent programmable spatial filters
- Pentium CPU with Windows NT installed
- Cassette ergo loader
- Wafer transfer area housing cover
- Wafer handling module
- High voltage electronics
- Front and Rear EMO’s with covers
- Flat panel display for AIT
- Fold down keyboard tray with built in mouse
- X/Y drive/controller chassis and motion controller card
- Blower Box (exhaust hoses not included)
- Operations Manual and Documentation
- FULLY REFURBISHED to meet KLA-Tencor AIT Factory Specifications
2000
Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
6-8 weeks
