KLA-Tencor AIT I
KLA-TENCOR AIT I PATTERNED SURFACE DEFECT INSPECTION SYSTEM consisting of:
- Model: AIT I
- Patterned Defect Inspection System
- KLA-Tencor AIT I Mainframe
- Currently configured for 8"/200mm wafers
- Double Darkfield Inspection Tool
- SECS II/GEM Communication Interface
- Low contact chuck (for KLA AIT I)
- Multi Channel collection optics system with independent programmable spatial filters
- Pentium CPU with Windows NT installed
- Cassette ergo loader
- Wafer transfer area housing cover
- Wafer handling module
- High voltage electronics
- Front and Rear EMO’s with covers
- Flat panel display for AIT
- Fold down keyboard tray with built in mouse
- X/Y drive/controller chassis and motion controller card
- Serial number: 8k74
- Operating System: Windows NT 4.0
- KLA S/W version: 3.3.1723- serial AIT_33
- Blower Box (exhaust hoses not included)
- Operations Manual and Documentation
- FULLY REFURBISHED to meet KLA-Tencor AIT Factory Specifications
N/A
Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
6-8 weeks
