KLA-Tencor AIT UV
KLA-TENCOR AIT UV DARKFIELD DEFECT INSPECTION SYSTEM consisting of:
- Model: AIT-UV Mainframe
- Darkfield Defect Inspection System
- Current setup: 8"/200mm Wafers
- Can be configured to process 6"/150mm, 8"/200mm, or 12"/300mm Wafers
- Software version: V6.3.24.2 on image computer, and 6.3.24.3 on AIT UV.
- Spot sizes installed: 3.5um, 5.0um, 2.2um
- Options installed: RTC, Signal Tower, GEM/SECs, HSMS, HLAT, Channel Merge, IADC, High Res Image Grab, Patch Grab
- Higher Sensitivity than AIT XP or AIT 2
- Automated Patterned Defect Inspection
- Standard KLA AIT Operator Interface Monitor
- Standard KLA AIT Operator Keyboard, Trackball and Joystick
- Standard KLA Media Devices: FD, CD Drives
- Windows NT Operating System
- Network Connections
- CE Marked
- Year of Manufacture: 2003
- Blower Box (exhaust hoses not included)
- Operations Manual and Documentation
- FULLY REFURBISHED to meet KLA-Tencor AIT Factory Specifications
- All our Used and Refurbished KLA-Tencor Equipment is Supported Worldwide
2003
Excellent Condition Guaranteed.
Fully Reconditioned to Meet Factory Specifications by ClassOne.
3 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.
6-8 weeks
