
KLA-TENCOR ASET F5x THIN FILM MEASUREMENT SYSTEM consisting of:
- Model: ASET F5x
- Can be configured to run either 200mm or 300mm wafers
- Dual Cassette 300mm FOUP Handler or 200mm Open Cassette Handler
- Spectroscopic ellipsometer
- Dual-beam spectrometer (DBS)
- Xenon light source with 220nm to 800nm wavelength range (1 Xenon Lamp)
- Three user selectable DBS spot sizes: 2.7, 10, 40 um
- Pattern Recognition (KLA F5x)
- 450 hz MMX Computer
- 9.1GB SCSI hard drive and 3.5
2000
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
6-8 weeks