
KLA-TENCOR 6100 CANDELA SURFACE INSPECTION SYSTEM consisting of:
- Model: 6100 Candela Surface Inspection System
- Dual Laser Class I (Violet)
- 405nm, 25mW Wavelength
- 60 Degree Incident Angle
- Multi Channel (Scatter, Topography, Phase Shift and Specular)
- Full Angular and Radial Scan
- 5 x 4 um Spot Size
- +/- 31 um Depth Focus
- > 80nm PSL Particle Sensitivity
- 1nm Depth Scratch Sensitivity
- Universal Clamp for Different Form Factor
- OD: 95mm/65mm
- ID: 25mm/20mm
- Refurbished to meet original KLA 6100 Candela Specifications.
- Refurbished to meet Original Specifications
- 3 Month Warranty and Factory Specifications Guarantee.
- Extended warranty available by request.
- Installation and Training is offered worldwide.
- This system can also be purchased in AS IS condition.
6-8 weeks