KLA-Tencor FLX-2320

Surface Metrology
Model:
KLA-Tencor FLX-2320 for sale
Price:
Request Price Quote     ID#:  4034
Picture:
Stress Measurement System, 200mm Chuck, up to 500C, Data Analysis Capability
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Details:

KLA-TENCOR FLX-2320 STRESS MEASUREMENT SYSTEM consisting of:


- Model: FLX-2320 (Flexus 2320)
- Manual Wafer Load
- Thin Film Stress Measurement System
- Chuck Size: 8"/200mm
- Temperature: up to 500C
- Dual Wavelength Technology
- Microsoft Windows based software
- System Printer included
- Brand New LCD Monitor
- Wafer Locator Included (1 set, select size at time of order)
- System Power: 220V, 60Hz, 15A
- Operations Manual KLA FLX-2320
- Refurbished to meet Flexus FLX-2320 specifications


KLA-TENCOR FLX-2320 SYSTEM CAPABILITIES consisting of:

- Thin-film stress measurement instrument that measures the changes in the radius of curvature of a wafer caused by the deposition of a stressed thin film.
- Laser scanning to measure stress on all reflecting films.
- Measures and displays stress as a function of time or temperature.
- Comprehensive data analysis capabilities that include trend plotting for statistical process control (SPC) and displaying a 3-D map of wafer deflection over the entire surface.
- Used for calculation of biaxial modulus of elasticity and linear expansion, water diffusion coefficient in dielectric films, linear regression and stress-temp or stress-time gradients.
- Provides analysis of thin film stress with very low measurement noise and allows observation and quantitative evaluation of stress relaxation, oxide densification, thin film phase transformations and annealing.

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Excellent Condition by ClassOne.
6 Month Warranty.
30 Day Right of Return.


Delivery:

10-12 weeks

Price:
      ID#:  4034