KLA-Tencor HRP-220 Profiler

Surface Metrology
Model:
KLA-Tencor HRP-220 Profiler for sale
Price:
Request Price Quote     ID#:  4030
Picture:
Automated Surface Profilometer, Calibrated to OEM Specifications, Up to 8"/200mm Wafer Capable, Automated Handler
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Details:

Refurbished KLA-TENCOR HRP-220 PROFILER consisting of:

- Model: HRP-220 Vintage 2000
- Automated Surface Profilometer
- Meets RFP 8-10292 SOW 3.0 Tool Process Specification
- Cassette to Cassette capability
- Scan method: Moving stage
- Scan length: 200mm
- Max Scan Speed: >20mm/sec
- Vertical Resolution: 1 A for range of +/- 3 um
- View Optics: low magnification and high magnification (up to 2000X)
- Step height repeatability: < 8 A for range of +/-3 um (1 sigma)
- Stylus size 1; 2; 5; 15; 25; 50 um
- Wafer sizes: 100; 150; 200 mm
- Throughput > 50 wafers per hour
- Programmed Rotary Stage repeatability: 4 um at 100mm from center ( 1 sigma)
- Rotary Stage angle: 0 - 360 deg
- Rotary Stage resolution: <0.1 deg
- Alignment Options: Notch Flat, None
- Hard Drive upgrade to 6 GB
- Upgrade to 24" Monitor
- Off- Line analysis capability
- Support 2D and 3D scanning and data analysis
- Calibrations step height standards (To Be Determined)
- 3 Months Warranty on Parts and Labor (Stylus is not covered under warranty)

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.


Delivery:

12 weeks

Price:
      ID#:  4030