KLA-Tencor Prometrix RS55/tca

KLA-Tencor Prometrix RS55tca Four Point Probe Resistivity Mapping System consisting of:

- Model: RS55 / tca
- Automated, Temperature Compenstation configuration (RS55 TCA)
- Up to 8"/200mm wafers
- Wafer Handler
- Cassette to Cassette Measurement
- Provides Contour Maps, 3-D Plots and Diameter Scans.
- Can compensate sheet resistance measurements against ambient temperature and materials TCR.
- Refurbished and Calibrated to meet Original Specifications (NIST Traceable)
- Power: 115V, 50/60 Hz
- Operations Manual for Prometrix RS55 TCA

Benefit of Temperature Compensation (TCA):
Temperature variations can impact sheet
resistance measurements by as much as one
percent per degree Celsius. Correcting for
these temperature variations can have a
dramatic effect on long-term repeatability,
accuracy, and system-to-system matching.

N/A

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications
3 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.

4-6 weeks