KLA-Tencor Prometrix RS75
KLA-TENCOR RS75 FOUR POINT PROBE SYSTEM consisting of:
- Model: RS-75 Four Point Probe System
- Up to 200 mm wafers
- One second per site overall measurement speed
- A 49-site contour map with temperature compensation can be achieved on a manually loaded test wafer in less than sixty seconds
- Provides precise sheet resistance measurements for monitor wafers, with significantly improved speed over existing systems
- Ideal for a wide range of semiconductor process monitoring applications such as ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP and bulk silicon
- Displays include contour maps, 3-D plots, and diameter scans
- Refurbished and Calibrated to meet Original Specifications (NIST Traceable)
- Operator Manual for Prometrix RS75 System
Also in Stock: KLA-Tencor Prometrix RS55/tca Four Point Probe Systems!
The only differences between a RS55 and RS75 is that a RS75 has faster throughput (100wph), it uses a notch/flat alignment technique compared to a RS55 that uses a prealigner, and it has a bigger disk drive.
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Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.
4-6 weeks
