KLA-Tencor Prometrix RS75/tca

Surface Metrology
Model:
KLA-Tencor Prometrix RS75/tca for sale
Price:
Request Price Quote     ID#:  3916
Picture:
Four Point Probe, Automated, Temperature Compensation, Up to 200mm, 3-D Plots, Contour Mapping
Details:

KLA-TENCOR PROMETRIX RS75A FOUR POINT PROBE SYSTEM consisting of:

- Model: RS-75A
- Four Point Probe System
- Up to 200 mm wafers
- Provides throughput of over 100 wafers per hour when conducting a five-site test
- One second per site overall measurement speed
- A 49-site contour map with temperature compensation can be achieved on a manually loaded test wafer in less than sixty seconds.
- Provides precise sheet resistance measurements for monitor wafers, with significantly improved speed over existing systems.
- Ideal for a wide range of semiconductor process monitoring applications such as ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP and bulk silicon.
- Displays include contour maps, 3-D plots, and
diameter scans
- Refurbished to Excellent Condition.
- Operator Manual for Prometrix RS75 System.


Also in Stock: KLA-Tencor Prometrix RS55/tca Four Point Probe Systems!
The only differences between a RS55 and RS75 is that a RS75 has faster throughput (100wph), it uses a notch/flat alignment technique compared to a RS55 that uses a prealigner, and it has a bigger disk drive.

Condition:

Excellent Condition Guaranteed.
3 Month Warranty.
30 Day Right of Return.


Delivery:

4-6 weeks

Price:
      ID#:  3916