KLA-TENCOR SURFSCAN 4000 WAFER INSPECTION SYSTEM consisting of:
- Model: Surfscan 4000
- Can handle from 2" up to 6"/150mm wafers
- Submicron sensitivity, detects 0.360 micron particles or approximately 0.15 micron squared
- Surface haze detected as low as 1.0 ppm.
- Handles high scattering surfaces such as metals, polysilicon and cvd films.
- Map locations and size available for each particle.
- Refurbished and guaranteed to meet OEM specifications
- New 17" LCD Monitor installed
- Operations Manual and documentation
REFURBISHMENT TO FACTORY SPECIFICATIONS consisting of:
- New Laser
- New Belts
- Clean or Replace Optics and Mirrors
- System calibrated to OEM specifications with NIST Calibration Standard
- Optics Alignment
- Indexer sensor replacement
- Vacuum line change out
- New 17" LCD Monitor
- 6 months warranty and specifications guarantee