KLA-Tencor Surfscan 6220
KLA-TENCOR SURFSCAN 6220 DEFECT INSPECTION SYSTEM consisting of:
- Model: Surfscan 6220
- Automatic Surface Inspection System
- Bare wafer surface defect inspection system
- Substrate/Sizes: 2", 3", 4", 6" and 8" wafer capable
- Thickness: SEMI Standard Wafer Thickness
- Material: Any Opaque, Polished Surface which Scatters less than 5 percent of Incident Light
- Defect Sensitivity: 0.09 Micrometer Diameter PSL Sphere Equivalent with greater than 80 percent Capture Rate (0.112um @ 90%)
- Repeatability: Count Repeatability Error less than 0.5 percent at 1 Standard Deviation (Mean Count greater than 500, 0.364 mm dia. Latex Spheres).
- Accuracy: Count Accuracy better than 99 percent (verified with VLSI Standards’ Relative Standard)
- Throughput: 100 wph (200 mm) at 0.12 mm
- Contamination: Less than 0.005 Particles/cm2 greater than 0.15 mm dia. per single pass
- Cassette Handling: Single Puck Wafer Handling from two Cassettes (one Sender/Receiver, one Receiver)
- Illumination Source: 30 mW Argon-Ion laser, 488 nm Wavelength
- Operator Interface: Mouse and/or Dedicated User Keypad
- Shipping Weight: 300 kg (670 lbs)
- Operations Manual and Documentation
SYSTEM REFURBISHED TO MEET FACTORY SPECIFICATIONS consisting of:
- New Laser
- New Power Supply
- Clean or Replace Optics and Mirrors
- System Calibrated to OEM Specifications
- Optics Alignment
- Email us for full refurbishing process details!
- 6 months warranty and guarantee
SYSTEM FACILITY REQUIREMENTS consisting of:
- Vacuum: 508 mm (20 in.) Hg
- Electrical: 200-240V, 50/60 Hz
- Power Requirement: 2 kVA
- Ducted Venting: Two 102 mm (4 in.) Exhaust Hoses
- Environment: Class 10 or better
- Installation Manual to be provided when order is placed
N/A
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
6-8 weeks
