KLA-Tencor Surfscan 6220

KLA-TENCOR SURFSCAN 6220 DEFECT INSPECTION SYSTEM consisting of:

- Model: Surfscan 6220
- Automatic Surface Inspection System
- Bare wafer surface defect inspection system

- Substrate/Sizes: 2", 3", 4", 6" and 8" wafer capable
- Thickness: SEMI Standard Wafer Thickness
- Material: Any Opaque, Polished Surface which Scatters less than 5 percent of Incident Light
- Defect Sensitivity: 0.09 Micrometer Diameter PSL Sphere Equivalent with greater than 80 percent Capture Rate (0.112um @ 90%)
- Repeatability: Count Repeatability Error less than 0.5 percent at 1 Standard Deviation (Mean Count greater than 500, 0.364 mm dia. Latex Spheres).
- Accuracy: Count Accuracy better than 99 percent (verified with VLSI Standards

N/A

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

6-8 weeks