KLA-Tencor Surfscan 6400
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KLA-TENCOR SURFSCAN 6400 DEFECT INSPECTION SYSTEM consisting of:
- Model: Surfscan 6400
- Bare wafer surface defect inspection system
Substrate Size Capability:
- Wafers Capable: 100mm, 125mm, 150mm, & 200mm
- Customer select wafer size at time of order
- Rectangles: 2x2 in., 3x3 in., 82x82 mm, 100x100 mm, 125x125 mm, 150x150 mm, 200x200 mm
- Disks: 8x35 mm, 12x48 mm, 20x65 mm, 25x95 mm, 40x130 mm
- Indexer is currently set for 8"/200mm wafers (easily changed upon request)
Substrate Thickness:
- Adjustable up to 12 mm. - Automatic adjustment within 2 mm range.
Material: - Any surface that scatters less than 90% of incident light
Defect Sensitivity:
- Most Surfaces: Better than 0.20 um (depending upon surface quality). - Polished Silicon: Better than 0.15 um at 95% capture rate
Repeatability Error:
- Count repeatability error less than 1.5% at 1 standard deviation (Mean count greater than 500 for 0.364-um diameter latex spheres on bare silicon).
Accuracy: Count Accuracy: Better than 99% as verified with VLSI Standards' Relative Standard Spatial Resolution: 50 um spacing, minimum
Dynamic Range:
- 0.1 um to 100 um in a single measurement
Throughput:
- Up to 120 wafers per hour using 150 mm wafers
- Up to 95 wafers per hour using 200 mm wafers
Contamination:
- Less than 0.5 particles/cm squared greater than 0.15 um diameter per single pass
Cassette Handling:
- Single puck handling from single cassette or platform. Sorting by robot optional.
Illumination Source:
- 30 mW Argon-Ion laser, 488 nm wavelength
Operating Sofware:
- Windows 98 Operating Software
- Operations Manual and Documentation
- Power: 208V, 1PH, 17A, 60Hz
Refurbished to Factory Specifications consisting of:
- New Laser
- New Power Supply
- Clean or Replace Optics and Mirrors
- System calibrated to OEM specifications
- Optics Alignment
- Email us for full refurbishing process details!
- 6 months warranty and guarantee
N/A
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
6-8 weeks
