KLA-Tencor Surfscan 6420

Wafer Inspection
Model:
KLA-Tencor Surfscan 6420 for sale
Price:
Request Price Quote     ID#:  4346
Picture:
New Laser, New Power Supply, Calibrated to OEM Specifications, up to 8"/200mm Wafer Capable
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Details:

KLA-TENCOR SURFSCAN 6420 SURFACE INSPECTION SYSTEM consisting of:

- Model: Surfscan 6420

- Bare wafer surface defect inspection system

- Substrate/Sizes: 2", 3", 4", 6" and 8" Wafer Capable

- Substrate Thickness: Adjustable up to 12 mm.

- Material: any surface that scatters less than 90% of incident light

- Cassette Handling: Single puck handling from single cassette or platform.

- Defect Sensitivity: Most Surfaces: Better than 0.12 um (depending upon surface quality).

- Defect Sensitivity: Polished Silicon: Better than 0.12 um at 95% capture rate.

- Illumination Source: 30 mW Argon-Ion laser, 488 nm wavelength

- Operating Software: Windows 98 Operating Software

- Operations Manual and Documentation

- Refurbished to Factory Specifications (see below for full details)

- System calibrated to OEM specifications

- 6 Month Warranty on Parts and Labor (Laser warranty is 12 months or 5000

hours whichever comes first. Puck is not covered under warranty)

Note: Calibration wafers are required for continued calibration of the system. If required, these can be quoted additionally.


KLA-TENCOR SURFSCAN 6420 REFURBISHMENT PROCESS consists of:


- Replace used Laser with New Laser

- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required

- Replace used Power Supply, as required

- Replacement or repair of any bad circuit board.

- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.

- Optics assemblies cleaned and aligned to meet performance specs or replaced as needed

- Electronic assemblies tested to meet performance specifications or replaced as needed

- Puck assembly rebuilt or replaced (if applicable)

- Calibrate system using calibration wafers

- Machine covers are cleaned, polished, or replaced, as needed

- System transport locks installed; system prepared for shipment

- Refurbishment carried out by KLA-Tencor Trained Technicians

- Intel Pentium Processor and Windows OS 98 SE Upgrade

- Video of KLA 6XXX refurbished by ClassOne: http://www.youtube.com/watch?v=2qu9bnHPYLg

Condition:

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.


Delivery:

14-16 weeks

Price:
      ID#:  4346