KLA-Tencor Surfscan SP1 Classic for sale

Metrology Equipment

KLA-Tencor Surfscan SP1 Classic

Model:

Price:

Request Price Quote ID#: M1245

Picture:

200mm Open Cassette & 300mm FOUP configuration

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Details:

KLA-Tencor SP1 Classic Wafer Surface Analysis System consisting of:

- Model: Surfscan SP1 Classic
- Wafer size: 200mm Open Cassette & 300mm FOUP configuration
- Provides Sensitivity, Repeatability, Surface Quality Measurements & Throughput Capabilities Required for 0.18um Process Technologies & Beyond
- 0.08um Defect Sensitivity on Well-Polished Silicon 95% Capture
- Defect Map & Histogram with Zoom Micro View Measurement Capability
- Up to 150 Wafers Per Hour throughput on 200mm Wafers
- Illumination Source: 30 mW Argon-Ion Laser, 488nm Wavelength
- Version 3.8 Software
- Operator Interface: MS Windows NT 4.0 OS
- TFT Flat Panel Display
- Parallel Printer Port
- Operations Manual for KLA SP1 Classic.
- Refurbished to meet original KLA SP1 Classic specifications.

Vintage:

1998

Condition:

- Refurbished to meet Original Specifications
- 6 Month Warranty and Factory Specifications Guarantee.

- Extended warranty available by request.
- Installation and Training is offered worldwide.
- This system can also be purchased in AS IS condition.

Delivery:

6-8 weeks

Price:

ID#: M1245