KLA-Tencor Surfscan SP1 DLS
You might also like:
KLA-TENCOR SP1 DLS UNPATTERNED SURFACE INSPECTION SYSTEM consisting of:
- Model: SP1 DLS with Dual Cassette / Port Handler
- Dual FIMS / Puck Handling
- Unpatterned Surface Inspection System
- Configured for 200/300mm Wafers
- Software Version 3.81
- 0.050um Defect Sensitivity on Polished Bare Silicon
- Enhanced Edge Exclusion
- Enhanced Rough Film Sensitivity
- Argon Ion Laser (488nm)
- Brightfield Dual Plane Brightfield
- XY Coordinates
- Includes Brightfield Sizing, Mx V4.0 Option
- Includes Haze Analysis and Haze Option
- Defect Map and Histogram with Zoom
- Single End Effector Robotic Handler w/Wafer Position Feedback Sensors
- Random Access Sender / Receiver Unit
- 4 Dark Field Collection Channels (Normal Wide, Normal Narrow, Oblique Wide, Oblique Narrow)
- RTDC (Real Time Defect Classification)
- Map to Map
- Operator Interface
- Microsoft Windows NT 4.0 Operating System
- NFS Client
- HSMS
- SECS 1
- Microview Measurement Capability
- Security, Logging & Native Networking as provided by Windows NT
- Interactive Pointing Device, Keypad Controls
- 18" TFT Flat Panel Display
- Parallel Printer Port
- BookOnBoard, Softcopy of SP1 Operations Manual
- Measurement Chamber with ULPA Filter and Blower Unit
*ClassOne Equipment will use standard Polystrene Sphere (PSL) Test Wafers for Acceptance Testing. It is recommended that the Customer purchase one or multiple PSL Test Wafers for on-going Sensitivity Testing.*
2004
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.
6-8 weeks
