KLA-Tencor Surfscan SP1 TBI
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KLA-TENCOR SURFSCAN SP1 TBI UNPATTERNED SURFACE INSPECTION SYSTEM consisting of:
- Model: SP1 TBI with dual cassette/port handler
- FLECWA (flipper + ECWA)
- Edge Handling
- BSIM (Backside Inspection Microscope)
- Unpatterned Surface Inspection System
- Configured for 200mm Wafers
- ClassOne Equipment will use standard Polystrene Sphere (PSL) test wafers for acceptance testing. It is recommended that the customer purchase one or multiple PSL test wafers for on-going senstivity testing
- Wafer Measurement Module
- Triple Beam Illumination (TBI)
- Normal Illumination- 0.079 Defect Sensitivity
- Oblique Illumination- 0.060 Defect Sensitivity
- 0.005 ppm Haze Sensitivity
- Ar Ion Laser (488 nm)
- RTDC (Real Time Defect Classification)
- Measurement Chamber with ULPA Filter and Blower Unit
- Operator Interface
- Microsoft Windows NT Operating System
- S/W version: 4.10.6224
- Security, Logging and Native Networking as provided by Windows NT
- Interactive Pointing Device, Key Pad Controls
- TFT Flat Panel Display
- Parallel Printer Port
- Defect Map and Histogram with Zoom
- Micro View Measurement Capability
- SECS/GEM
- Blower Box
- Refurbished to meet Specifications
- Operations Manual for KLA-Tencor SP1 TBI
- S/N 0901-0737
2001
- Refurbished to meet Factory Specifications.
- 6 Month Warranty and Factory Specifications Guarantee.
- Extended Warranty available by request.
- Service Contracts available by request.
- Installation and Training is offered worldwide.
8-10 weeks
