KLA-Tencor UV-1280SE for sale

Metrology Equipment

KLA-Tencor UV-1280SE

Model:

Price:

Request Price Quote ID#: 3222

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Details:

KLA-TENCOR UV-1280SE THIN FILM MEASUREMENT SYSTEM consisting of:

- Model: Prometrix UV-1280 SE
- Max wafer capable: 200mm
- Measures Film Thickness, Refractive Index (RI) and Extinction Coefficient of Single and Multi-Layer Thin Film Stacks Simultaneously without Referencing
- Reflectivity Range of 220 nm to 800 nm
- Intel Pentium Computer
- Operations Manuals for KLA UV1280
- Fully Refurbished to meet original KLA UV1280 specifications
- Available for full inspection and demonstration in our Class 100 Cleanroom!

KLA UV-1280 MEASUREMENT CAPABILITIES*:
Single Layer Thickness (t):
- Thermal Oxide: 0 Å to 40 μm
- Oxynitride: 0 Å to 30 μm
- Nitride: 0 Å to 25 μm
- BPSG: 0 Å to 40 μm
- Photoresist: 0 Å to 40 μm
- Polyimide: 0 Å to 40 μm
- Poly on Oxide: 50 Å to 2 μm Poly on 40 Å to 4000 Å Oxide
- Poly on Nitride: 50 Å to 2 μm Poly on 40 Å to 4000 Å Nitride
- Amorphous Silicon: 50 Å to 2 μm Amorphous on 40 Å to 4000 Å Oxide or Nitride
- Oxide on Poly: 50 Å to 1 μm Oxide on <500 Å Poly
- Nitride on Poly: 50 Å to 1 μm Nitride on <500 Å Poly
- TiN: 80 Å to 500 Å
- Oxide on Aluminum: <1000 Å to 25 μm
- Oxide on Tungsten: <1000 Å to 25 μm
Single Layer Refractive Index (N, k):
- Thermal Oxide: <100 Å
- Oxynitride: <100 Å
- Nitride: <100 Å
- BPSG: <500 Å
- Poly on Oxide: <100 Å
- Amorphous Silicon: <100 Å
- TiN: <200 Å
Simultaneous MultiLayer and Simultaneous MultiVariable Measurements:
- Up to 7 Unknowns in up to an 8 Layer Stack

KLA UV-1280 ABSOLUTE ACCURACY:
Thickness:
±1.5 Å of NIST Certified Range for Oxide <125 Å:
±1 Å of NIST Certified Range for Oxide 125 Å to 300 Å
±1% of NIST Certified Range for Oxide
300 Å to 1.0 μm
Index:
±0.025 for >350 Å to 1.0 μm Oxide
±0.025 for >250 Å to 1.0 μm Nitride

KLA UV-1280 STABILITY (3 SIGMA OF MEANS):
Oxide and Nitride Thickness:
- 20-100 Å T <0.48 Å
- 100-300 Å T <0.9 Å
- 200-2000 Å T <0.15 Å
- 2000 Å-1.0 μm T <0.002Å
(Two Parameter Measurements)

KLA UV-1280 SOFTWARE, DATA ANALYSIS & COMMUNICATIONS:
Data Analysis, Processing & Uploading/Communications Capabilities:
– Graphical User Interface, Multi-Tasking
– Average, Difference, Ratio Maps
– Process Control Charts
– Statistical Calculations
– Database Management
– ASCII Data and Recipe Upload or to a Floppy
– Correlation Curves
– Pattern Recognition Transportability
– Auto Model Select Pattern Recognition
– Multiple Films (9) and Sites per Die
– Integrated Spectral Analysis
– Goodness of Fit, Normalized Goodness of Fit
– Tabular, Bruggeman, Cauchy, Harmonic Oscillators and Polynomial Optical Constants
– Integrated Wafer Navigator
– Sequential Recipe Cassettes
– One-Button Cassettes: per User
- Security Password Protection: User Defined
- Etch-to-Clear Algorithm
- HSMS Ethernet (used for UV1280 communication)

Vintage:

2000

Condition:

Excellent Condition Guaranteed.

Fully Reconditioned to Factory Specifications.

6 Month Warranty and Full Specification Guarantee.

30 Day Right of Return.

Delivery:

6-8 weeks

Price:

ID#: 3222