Suss M6000L Lift Off System

Semitool Wet Process
Model:
Suss M6000L Lift Off System for sale
Price:
Request Price Quote     ID#:  3634
Picture:
Fully Automated, Single Wafer System, for metal Lift-Off process, Chemical Delivery Unit
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Details:

SUSS M6000L LIFT OFF SYSTEM consisting of:
  
- Manufacturer: Suss MicroTec 
- Model: M6000L 
- Process: Lift-Off (resist and metal)
- Currently set for 4" Wafers
- Wafer Size capable: 3" up to 6" diameter
- Cassette to Cassette handling
- Lift-Off Process Chamber (Module)
- High Pressure dispense arm for dispensing recirculated NMP
- Fan jet nozzle for dispensing fresh NMP
- N2 backside rinse
- Stainless Steel filters
- Pneumatically controlled centering jaws
- Drive via indirect AC servo motor
- Send/Receive Module
- System Robot
- Rinse Module (DI water rinse wafers above and below)
- DI Water rinse via puddle nozzle 
- 2-Tanks (1 for fresh, 1 for used NMP)
- Chemical Delivery Cabinet 
- Power Supply
- Emergency Off (EMO)
- 2 Chillers

More Info: 
The Suss M6000L is designed for Lift-Off applications (e.g. removal of resist and metal from wafers). The lift-off process is carried out with heated and cold NMP medium followed by rinsing with DI water in a separated rinsing station. Fresh medium is dispensed via a fan spray nozzle at the upper section of the chamber; recirculated NMP medium is despensed by a high-pressue (thermo-controlled) and/or fan spray nozzles (thermo-controlled).  

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.


Delivery:

6-8 weeks

Price:
      ID#:  3634              
 

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