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Mask Aligners

Mask Aligners

ClassOne Equipment is the industry’s premier source for refurbished mask aligners for semiconductor lithography applications from R&D to volume production.  We carry an extensive inventory of refurbished mask aligners from top manufacturers Suss Microtec, EVG, OAI, and ABM.  Our turn-key solution includes full refurbishment to original specifications, industry leading 6-month warranty, and full installation and training by experienced factory trained technicians.  Post sale service, maintenance, and spare parts support is provided on all refurbished mask aligners.  Our singular focus is on giving our customers the quality and reliability they expect at a price they can afford. We’re confident that a ClassOne refurbished mask aligner is simply the best you can buy.

Every mask aligner we sell is refurbished to meet its original specifications, and we back this superior refurbishment process with an industry-leading 6-month warranty on parts and labor and a 30-day return policy. In addition to our order lead times being less than half those of the OEMs, buying a refurbished mask aligner can save you up to 65% off their prices while providing the same exceptional quality and performance you demand. 

WE SPECIALIZE IN THE FOLLOWING MASK ALIGNERS:

  • Suss MJB3 Mask Aligner
  • Suss MJB4 Mask Aligner
  • Suss MA6 Mask Aligner
  • Suss MA8 Mask Aligner
  • Suss MA150 Mask Aligner
  • Suss MA200 Mask Aligner
  • EVG 420 Mask Aligner
  • EVG 620 Mask Aligner
  • EVG 6200 Mask Aligner
  • OAI 200 Mask Aligner
  • OAI 500 Mask Aligner
  • OAI 8000 Mask Aligner
  • ABM Mask Aligners

REFURBISHMENT PROCESS:

1 Receiving and Preparation
  • System is cleaned and  inspected upon arrival at our facility
  • System is moved into our mask aligner lab to begin refurbishment
  • All sub-assemblies are completely disassembled for checkout, testing, refurbishment, or replacement 
2 Refurbishment

All subassemblies are cleaned, lubricated, reassembled, adjusted, and tested to verify operation to original specifications as follows:   
  • Wafer Alignment Stage rebuilt
  • WEC Head rebuilt
  • Transport Slide rebuilt
  • Microscope Assembly rebuilt
  • Lamp Power Supply tested
  • Pneumatic Hoses tested and replaced, as needed
  • All system tubing replaced with new
  • Manipulator Assembly fully rebuilt
  • Pre-Aligner Assembly (if applicable)
  • All worn or damaged parts are repaired, replaced with brand new, or upgraded
  • Full optical alignment of microscope performed
  • Exposure optics are cleaned, tested and adjusted
  • Brand new or newly coated Ellipsoidal Mirror installed
  • Brand new Ushio 350W or 1000W lamp installed
  • Machine covers are repainted or replaced as needed
  • Machine is fully re-assembled
  • Machine is fully tested to verify compliance to original specifications
  

* Each refurbished Mask Aligner receives a brand new ellipsoidal mirror, mercury lamp, and cold light mirror.
3 Quality Control
  • System deinstalled and secured for transport 
  • System packed: all components and accessories bubble wrapped individually
  • All parts packed are labeled clearly
  • Professional crating of system

Our team is ready to help with installation, training and after sales service of your newly refurbished mask aligner.

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Available Equipment
view inventory Used Mask Aligners
ClassOne has a dedicated mask aligner refurbishment lab fully equipped for full customer demonstrations.
6 month warranty
WE OFFER THE COMPLETE SOLUTION
Large inventory of equipment, thorough refurbishment process, factory trained technicians to provide installation and training, after sales spare parts and service, up to 6 month warranty, 30-day return policy.