SPTS MPX ICP ASE Etcher

Plasma Etchers & PECVD
Model:
SPTS MPX ICP ASE Etcher for sale
Price:
Request Price Quote     ID#:  3734
Picture:
Single Chamber, Load-Locked, 150mm/200mm wafer capable
photo
photo
Click an image to view full size.
Details:
SPTS MULTIPLEX ICP ASE SR ETCHER consisting of:

- Model: MESC ICP / DRIE
- Process: Deep Silicon Etch (DRIE)
- Single process chamber with manually loaded vacuum loadlock
- Inductively Coupled Plasma Source (ICP)
- Currently Configured for 8"/200mm Wafers
- Carousel Load Lock (2-Wafer Carousel)
- Load-Lock Chamber
- Electrostatic Chuck (ESC)
- Edwards IQDP80 Vacuum Pump (Chamber)
- Edwards 40 Vacuum Pump (Load Lock)
- Affinity Chiller
- E-Rack
- 13.56MHz RF Generator (Source)
- 13.56MHz RF Generator (Lower Electrode)
- Leybold Turbo Pump
- System Cables (full set)
- User Manuals & Documentation
- Serial Number: 28143

On Board Gas Box with Following Gas Configuration:

- Ar
- SF6
- C4F8
- O2
- N2


REFURBISHED TO MEET OEM SPECIFICATIONS:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines purged.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.

Condition:
Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
Delivery:

8 weeks

Price:
      ID#:  3734