Nanometrics Nanospec 8300

Nanometrics Nanospec 8300 Film Thickness Measurement System consisting of:

- Model: Nanospec 8300
- Wafer Size: 200mm and 300mm wafers
- Automatic film thickness measurement system
- Thin film analysis via Spectroscopic Ellipsometry, UV Reflectometry, and Visible Reflectometry
- Sophisticated modeling algorithms for the determination of optical constants and film thickness
- Multi-tasking capability for high throughput and low Cost-of-Ownership
- Comprehensive data analysis via mapping and SPC software packages
- Spectroscopic Ellipsometer
- New style TRI-CCD standalone Pre-Aligner for better accuracy than IR

Nanospec 8300 Data Analysis Capabilities:

- Mapping Die, contour, 2 and 3 dimensional color, and differential
- Stage Scanning Line scan and diameter scan
- SPC software Trend charts and histograms
- Database Spreadsheet compatible

Nanospec 8300 Reflectometer Measurement Specifications:

- Spot Sizes:
*Visible 6, 25 and 62 μm
*UV 17 μm
- Single Layer Films:
*Visible 500Ã…-30um
*UV 25-500Ã…
- Double Layer Films:
*Visible -Top Layer 100-30,000Ã…
*Visible -Bottom Layer 100-10,000Ã…
- Triple Layer Films:
*Consult Factory
- Single Layer Thick Films:
*Visible 4-30um
- Absolute & Relative Reflectance:
*Visible 400-800nm
*UV 190-400nm
- Oxide on Poly:
*UV 150-10,000Ã…
- Oxide on Metal:
*Visible 3,000-20,000Ã…
*UV 500-5,000Ã…
- Refractive Index:
*1,000-10,000Ã…

Spectroscopic Ellipsometer (SE) Measurement Specifications:

- Single Layer Thickness:
*Thermal Oxide: 0 Angstroms to 40 μm
*Oxynitride: 0 Angstroms to 30 μm
*Nitride: 0 Angstroms to 30 μm
*BPSG: 0 Angstroms to 40 μm
*Photoresist: 0 Angstroms to 30 μm
*Polyimide: 0 Angstroms to 40 μm
*Polysilicon on Oxide: 50 Angstroms to 5 μm Poly, on 20 Angstroms to 2 μm oxide
*Polysilicon on Nitride: 50 Angstroms to 5 μm Poly, on 20 Angstroms to 2 μm Nitride
*Amorphous Silicon: 50 Angstroms to 2 μm a-Si, on 20 Angstroms to 2 μm oxide
*Oxide on Polysilicon: 0 Angstroms to 5 μm oxide on >100 Angstroms Poly
*Nitride on Polysilicon: 0 Angstroms to 5 μm nitride on >100 Angstroms Poly
*TiN: 0–1,000 Angstroms
*Oxide on Metal: 0 Angstroms to 40 μm

- Single Layer Refractive Index (n, k):
*Oxide: > 100 Angstroms
*Oxynitride: > 100 Angstroms
*Nitride: > 100 Angstroms
*Polysilicon on Oxide: > 100 Angstroms
*Amorphous Silicon: > 100 Angstroms
*TiN: > 100 Angstroms

- Multilayers:
*NO: Both thicknesses, Nitride optical constants
*PO: Both thicknesses, Poly optical constants and surface roughness
*PN: Both thicknesses, Poly optical constants and surface roughness
*a-Si / O: Both thicknesses, a-Si optical constants and surface roughness
*OPO: All three thicknesses, Poly optical constants, interfacial roughness between poly and
top oxide
*NPO: All three thicknesses, Poly optical constants, interfacial roughness between poly and
nitride
*OTiN: Oxide thickness and index
*TiN / O: Both thicknesses, TiN optical constants
*ONO: All three thicknesses. Nitride optical constants for films thicker than 200 Angstroms
*NOPO: All four thicknesses, poly optical constants, nitride optical constants in some cases
*ONOPO: All five thicknesses, poly optical constants
*OPOPO: All five thicknesses, poly optical constants assuming same constants for both poly
layers

- This Nanospec 8300 is fully refurbished meeting all original factory specifications.
- This Nanospec 8300 can be inspected and demonstrated at our facility in Atlanta, Georgia.

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Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
3 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.

4-6 Weeks