OXFORD PLASMALAB 100 ICP ETCHER consisting of:

- Manufacturer: Oxford Instruments
- Model: Plasmalab 100 ICP-RIE 180
- SN: 94-815006
- Vintage: 2009
- Process gases used: H2, O2, N2, Ar, CF4, SF6, CHF3, He, CH4
- Backup gases: Cl2 and BCl3
- Standard operating temperature: 20°C
- Operating temperature range: 5 - 70°C
- Substrate cooling: Thermo Electron RTE water chiller
- RF source 300 W, 13.56 MHz
- ICP source 3000 W, 13.56 MHz
- Base pressure: 1E-6 Torr
- Horiba Laser Endpoint Detector
- Retrofitted load lock

Pumps:

Main Chamber Backing Pump:

- Manufacturer: Adixen
- Type: Dry pump (multi roots) 
- Model: ADP 122 P

Main Chamber Turbo Pump:

- Manufacturer: Pfeifer Vacuum 
- Type: Turbo
- Model:TPH521PC

Load Lock:

- Manufacturer: Adixen
- Type: Dry pump (multi roots) 
- Model: ACP 15G

REFURBISHED TO MEET OEM SPECIFICATIONS consisting of:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.