Oxford Plasmalab 100 RIE

Plasma Etchers & PECVD
Model:
Oxford Plasmalab 100 RIE for sale
Price:
Request Price Quote     ID#:  4222
Picture:
Oxford Plasmalab 100 RIE System
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Details:

OXFORD PLASMALAB 100 RIE SYSTEM consisting of:

- Model: Plasmalab 100 Plus
- Up to 8"/200mm wafer handling
- Allows small batch processing for R&D and Pilot Production
- Load-locked System
- Computer, Keyboard, New Flat Panel Monitor
- System Chiller
- Turbo Pump
- Load Lock Pump
- Operations Manual and Documentation
- Offered as Fully Refurbished and Meeting Original Specifications

Gas Module currently set up for the following gases (Capable of 6 Gases):

- Ar
- O2
- Cl2
- SiCl4

Condition:

Fully Reconditioned to Factory Specifications by ClassOne Equipment.
6 Month Warranty and Specifications Guarantee.
30 Day Right of Return.


Delivery:
Price:
      ID#:  4222