Oxford Plasmalab 80 Plus PECVD

Plasma Etchers & PECVD
Model:
Oxford Plasmalab 80 Plus PECVD for sale
Price:
Request Price Quote     ID#:  4021
Picture:
Oxford Plasmalab 80 Plus PECVD System
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Details:

OXFORD PLASMALAB 80 PLUS PECVD consisting of:

- Model: Plasmalab 80 Plus
- Single PECVD chamber, non load-locked
- PC
- PC2000 Software
- ENI ACG-3 RF Generator
- Honeywell Temperature Controller
- MKS 152 Automatic Pressure Controller
- Vacuum Pump with Blower
- Chiller
- Operations Manual and Documentation

Gas Pod Currently Configured for:
- CH4: 500sccm
- He: 1000sccm
- SiH4: 50sccm
- NH3: 50sccm
- N2: 1000sccm
- Clean Gas (Manual Flow Meter)

Condition:

Excellent Condition Guaranteed.
Fully Refurbished by ClassOne.
6 Month Warranty
30 Day Right of Return.


Delivery:

8-10 weeks

Price:
      ID#:  4021