Oxford Plasmalab 80 Plus PECVD
Model:
Oxford Plasmalab 80 Plus PECVD for sale
Price:
Request Price Quote ID#: 4021
Picture:
Click an image to view full size.
Details:
OXFORD PLASMALAB 80 PLUS PECVD consisting of:
- Model: Plasmalab 80 Plus
- Single PECVD chamber, non load-locked
- PC
- PC2000 Software
- ENI ACG-3 RF Generator
- Honeywell Temperature Controller
- MKS 152 Automatic Pressure Controller
- Vacuum Pump with Blower
- Chiller
- Operations Manual and Documentation
Gas Pod Currently Configured for:
- CH4: 500sccm
- He: 1000sccm
- SiH4: 50sccm
- NH3: 50sccm
- N2: 1000sccm
- Clean Gas (Manual Flow Meter)
Condition:
Excellent Condition Guaranteed.
Fully Refurbished by ClassOne.
6 Month Warranty
30 Day Right of Return.
Delivery:
8-10 weeks
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