OXFORD PLASMALAB 80 PLUS PECVD consisting of:
- Model: Plasmalab 80 Plus
- Single PECVD chamber, non load-locked
- PC
- PC2000 Software
- ENI ACG-3 RF Generator
- Honeywell Temperature Controller
- MKS 152 Automatic Pressure Controller
- Vacuum Pump with Blower
- Chiller
- Operations Manual and Documentation
Gas Pod Currently Configured for:
- CH4: 500sccm
- He: 1000sccm
- SiH4: 50sccm
- NH3: 50sccm
- N2: 1000sccm
- Clean Gas (Manual Flow Meter)
Excellent Condition Guaranteed.
Fully Refurbished by ClassOne.
6 Month Warranty
30 Day Right of Return.
8-10 weeks