OXFORD PLASMALAB 80 PLUS PECVD consisting of:
- Model: Plasmalab 80 Plus
- Single PECVD chamber, non load-locked
- Windows 7 PC ($25,000 upgrade included)
- Upgraded PLC with latest Software
- Vacuum Pump
- Chiller
- Operations Manual and Documentation
GAS CONFIGURATION :
- N2
- O2
- CF4
- Ar
Excellent Condition Guaranteed.
Fully Refurbished by ClassOne.
6 Month Warranty
30 Day Right of Return.
8-10 weeks