Oxford Plasmalab 80 Plus RIE
Oxford Plasmalab 80 Plus RIE consisting of:
- Model: Plasmalab 80 Plus RIE
- Non-Load Locked Reactive Ion Etcher
- Fluorine chemistry (for Silicon Etch)
- Up to 8"/200mm Wafer Capable
- 300W RF Generator & Airvane Capacitor Automatch Unit for RIE
- 240mm Water Cooled Aluminum Lower Electrode
- 240mm Quartz Cover Plate
- Turbo Pump
- 1 Torr Capacitance Manometer and Active Penning Guage
- Oxford PC2000 Software
- Windows XP OS
- System Computer
- Brand New 17" LCD Monitor
- Gas Box with 4 MFCs installed (total of 6 MFCs can be installed)
- System Chiller
- System Vacuum Pump
- Manufactured in 2005!
- Like-new condition!!
ClassOne Support Worldwide of Plasmatherm Etchers:
- ClassOne Supports all its Used and Refurbished Oxford equipment with Spare Parts and Service Worldwide
- Installation & Training available Worldwide
2005
Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.
10-12 weeks
